ZnO:Al thin films from (Al2O3)x(ZnO)(1-x) powder targets by magnetron sputtering
- Title
- ZnO:Al thin films from (Al2O3)x(ZnO)(1-x) powder targets by magnetron sputtering
- Creator
- Sathish; Shaik H.; Kumar K.N.; Jafri R.I.; Reddy G V A.; Sattar S.A.
- Description
- In the present work we prepared Aluminum doped Zinc Oxide (AZO) thin films from powder targets. Various concentrations (W/W percentages) of Al2O3 such as1%, 2%, 3%, 4%, 5%, 6%, 7% and 8% were mixed in ZnO powder and made in the form of a 3 inch disc target. These ceramic targets are sputtered in RF magnetron sputtering unit for the deposition of AZO thin films. Optical and electrical properties are analyzed to get an optimized percentage of mixing for achieving high transparency and low resistivity. At Al2O3 percentage of 3% there is a considerable decrement in the resistivity, and at 7% there is a considerable decrease in the optical transmittance. Mobility and carrier concentration are increasing with Al2O3 percentage. Bandgap of the films is observed to be decreasing with increasing the Al2O3 percentage. 2021 Elsevier Ltd and Techna Group S.r.l.
- Source
- Ceramics International, Vol-47, No. 11, pp. 14997-15004.
- Date
- 2021-01-01
- Publisher
- Elsevier Ltd
- Subject
- AZO; Device; Powder target; Solar cell; Sputtering; TCO; ZnO
- Coverage
- Sathish, Department of Physics, Nitte Meenakshi Institute of Technology, Bengaluru, 560064, Yelahanka, India, Center for Nanomaterials and MEMS, Nitte Meenakshi Institute of Technology, Bengaluru, 560064, Yelahanka, India; Shaik H., Department of Physics, Nitte Meenakshi Institute of Technology, Bengaluru, 560064, Yelahanka, India, Center for Nanomaterials and MEMS, Nitte Meenakshi Institute of Technology, Bengaluru, 560064, Yelahanka, India; Kumar K.N., Department of Physics, Nitte Meenakshi Institute of Technology, Bengaluru, 560064, Yelahanka, India, Center for Nanomaterials and MEMS, Nitte Meenakshi Institute of Technology, Bengaluru, 560064, Yelahanka, India; Jafri R.I., Department of Physics and Electronics, Christ University, Hosur Road, Bengaluru, 560029, India; Reddy G V A., Department of Physics, Nitte Meenakshi Institute of Technology, Bengaluru, 560064, Yelahanka, India; Sattar S.A., Department of Physics, Nitte Meenakshi Institute of Technology, Bengaluru, 560064, Yelahanka, India
- Rights
- Restricted Access
- Relation
- ISSN: 2728842; CODEN: CINND
- Format
- Online
- Language
- English
- Type
- Article
Collection
Citation
Sathish; Shaik H.; Kumar K.N.; Jafri R.I.; Reddy G V A.; Sattar S.A., “ZnO:Al thin films from (Al2O3)x(ZnO)(1-x) powder targets by magnetron sputtering,” CHRIST (Deemed To Be University) Institutional Repository, accessed February 23, 2025, https://archives.christuniversity.in/items/show/15735.