Dublin Core The Dublin Core metadata element set is common to all Omeka records, including items, files, and collections. For more information see, http://dublincore.org/documents/dces/. Title A name given to the resource Articles Article Faculty Publications -Articles Dublin Core The Dublin Core metadata element set is common to all Omeka records, including items, files, and collections. For more information see, http://dublincore.org/documents/dces/. Title A name given to the resource A new optimal design and analysis method based on MADM for MEMS products development Subject The topic of the resource Design flow; MADM; MEMS; Microelectromechanical systems; Optimal design; Power sensor; RF MEMS Description An account of the resource Abstract This paper presents an optimum design method to support the total micro-electromechanical systems (MEMS) product/device optimization, and its evaluation at the conceptual stage itself using the multiple attribute decision making method. In the traditional MEMS product development cycle, simulation and design using software tools are very important due to the knowledge limitation and complexity in design, fabrication, and packaging processes. The available tools are time consuming and relay on trial and error to achieve an optimum solution. The proposed method simplifies the relationship between parameters of design, fabrication, materials, packaging, and the performance of the MEMS product. The methodology is explained with the help of design flow diagram and time chart. A MEMS-based radio frequency (RF) power sensor is designed and the methodology is demonstrated. The proposed sensitivity analysis method is more effective and less time consuming than traditional techniques. Sensitivity analysis is carried out by varying the thickness of the signal conductor. The results of RF power sensor with insertion loss 0.428 dB, reflection loss 25.956 and voltage standing wave ratio of 1.106 at 1.5 GHz are reported. Springer-Verlag London Limited 2012. Creator An entity primarily responsible for making the resource Prince A.A.; Jose I.; Agrawal V.P. Source A related resource from which the described resource is derived International Journal of Advanced Manufacturing Technology, Vol-63, No. 46000, pp. 851-861. Date A point or period of time associated with an event in the lifecycle of the resource 2012-01-01 Identifier An unambiguous reference to the resource within a given context <a href="https://doi.org/10.1007/s00170-012-3969-7" target="_blank" rel="noreferrer noopener">https://doi.org/10.1007/s00170-012-3969-7</a> <br /><br /><a href="https://www.scopus.com/inward/record.uri?eid=2-s2.0-84870061773&amp;doi=10.1007%2Fs00170-012-3969-7&amp;partnerID=40&amp;md5=4aade606715a7e9baa06cf81c30d1a5d" target="_blank" rel="noreferrer noopener">https://www.scopus.com/inward/record.uri?eid=2-s2.0-84870061773&amp;doi=10.1007%2fs00170-012-3969-7&amp;partnerID=40&amp;md5=4aade606715a7e9baa06cf81c30d1a5d</a> Rights Information about rights held in and over the resource Restricted Access Relation A related resource ISSN: 14333015; CODEN: IJATE Format The file format, physical medium, or dimensions of the resource Online Language A language of the resource English Type The nature or genre of the resource Article Coverage The spatial or temporal topic of the resource, the spatial applicability of the resource, or the jurisdiction under which the resource is relevant Prince A.A., Electrical and Electronics Engineering Department, BITS-Pilani K.K. Birla Goa Campus, Zuarinagar, Goa 403726, India; Jose I., Electronics and Communication Engineering Department, Christ University, Bangalore 560060, India; Agrawal V.P., Department of Mechanical Engineering, Thapar University, Patiala 147004, India