Deposition and characterization of ZnO thin films on corning glass substrate using Magnetron sputtering
- Title
- Deposition and characterization of ZnO thin films on corning glass substrate using Magnetron sputtering
- Creator
- Kumar K.N.; Karkal R.N.; Shaik H.; Jafri R.I.; Maligi A.S.; Salimath S.D.; Singh O.; Ramya H.G.
- Description
- The Zinc Oxide (ZnO) thin films were deposited on corning glass substrates using RF Magnetron sputtering at a substrate temperature of 400 C and thicknesses of 1000 nm and 2000 nm. SEM, EDX, XRD, and UV-Vis spectrometers were used to analyse the thin films' morphological, structural, and optical characteristics. SEMwas used to analyse the surface morphology of the thin films. The composition of the created thin films was evaluated using EDX. XRD was used to examine the crystalline structure of the deposited ZnO films. Using the Debye-Scherrer equation, the average sample crystal size was determined. Uv-Vis was used to analyse the optical characteristics of the thin films. The findings showing how well-piezoelectric the produced thin films are may be useful in developing Surface Acoustic Wave Devices. 2024 Author(s).
- Source
- AIP Conference Proceedings, Vol-3122, No. 1
- Date
- 2024-01-01
- Publisher
- American Institute of Physics
- Subject
- Bandgap; Optical properties; Refractive index; Structural; Thickness; ZnO Thin films
- Coverage
- Kumar K.N., Dept. of Physics, Nitte Meenakshi Institute of Technology, Yelahanka, Bengaluru, India, Centre for Nano-materials and MEMS, Nitte Meenakshi Institute of Technology, Yelahanka, Bengaluru, India; Karkal R.N., Dept. of Electronics & Communication Engineering, Nitte Meenakshi Institute of Technology, Yelahanka, Bengaluru, India; Shaik H., Dept. of Physics, Nitte Meenakshi Institute of Technology, Yelahanka, Bengaluru, India, Centre for Nano-materials and MEMS, Nitte Meenakshi Institute of Technology, Yelahanka, Bengaluru, India; Jafri R.I., Dept. of Physics & Electronics, Christ University, Bengaluru, India; Maligi A.S., Dept. of Electronics & Communication Engineering, BMSCE College of Engineering, Bengaluru, India; Salimath S.D., Dept. of Electronics & Communication Engineering, Nitte Meenakshi Institute of Technology, Yelahanka, Bengaluru, India; Singh O., Dept. of Electronics & Communication Engineering, Nitte Meenakshi Institute of Technology, Yelahanka, Bengaluru, India; Ramya H.G., Dept. of Electronics & Communication Engineering, Nitte Meenakshi Institute of Technology, Yelahanka, Bengaluru, India
- Rights
- Restricted Access
- Relation
- ISSN: 0094243X
- Format
- Online
- Language
- English
- Type
- Conference paper
Collection
Citation
Kumar K.N.; Karkal R.N.; Shaik H.; Jafri R.I.; Maligi A.S.; Salimath S.D.; Singh O.; Ramya H.G., “Deposition and characterization of ZnO thin films on corning glass substrate using Magnetron sputtering,” CHRIST (Deemed To Be University) Institutional Repository, accessed February 25, 2025, https://archives.christuniversity.in/items/show/18961.